CASE STUDY

QSense analysis of CMP slurry additive and abrasive interaction with a ceramic surface

This case study shows how QSense® QCM-D (Quartz Crystal Microbalance with Dissipation monitoring technology) can be used to study slurry additive and abrasive interaction with surface materials relevant to the electronics industry.

In this case study you will find:  

  • Experimental layout
  • Measurement executionCMP additive surface interaction analysis
  • Analysis of the results

Get the case study