Case Study

QSense analysis of CMP slurry additive and abrasive interaction with a ceramic surface

This case study shows how QSense® QCM-D (Quartz Crystal Microbalance with Dissipation monitoring technology) can be used to study slurry additive and abrasive interaction with surface materials relevant to the electronics industry.

Webinar details

  • Length
    3 pages
  • Technologies
    QCM-D
  • Application
    CMP
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CMP slurry additive

In this case study:

  • Experimental layout
  • Measurement execution
  • Analysis of the results

 

 

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